Title

Optical fiber-tip pressure sensor featuring a spring body and multipositional Fabry–Pérot cavity resonator

Document Type

Conference Proceeding

Publication Date

2021

Abstract

This work presents a pressure sensor utilizing a Fabry–Pérot (FP) resonator fabricated onto the cleaved end of an optical fiber via two-photon polymerization (2PP) micro-fabrication. This technique enables complex three-dimensional (3D) designs with sub-micron resolution and advanced features including: a hinged, multipositional mirror for directional thin film deposition, a 3D spring body to displace this mirror without deforming it, and adhesive retaining features for sealing the cavity. The sensor demonstrates a sensitivity of -0.134 nm/psig over a range of 5 – 55 psig and operates with a simple broad band source (BBS) for optical input. Finite element analysis (FEA) agrees well with the observed results and is used to extract a plausible set of material parameters. This device presents a launching point for utilizing the 3D freedom of 2PP microfabrication to advance fiber optic pressure sensors.

Comments

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DOI

10.1109/MEMS51782.2021.9375301

Source Publication

IEEE

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