Optical fiber-tip pressure sensor featuring a spring body and multipositional Fabry–Pérot cavity resonator
This work presents a pressure sensor utilizing a Fabry–Pérot (FP) resonator fabricated onto the cleaved end of an optical fiber via two-photon polymerization (2PP) micro-fabrication. This technique enables complex three-dimensional (3D) designs with sub-micron resolution and advanced features including: a hinged, multipositional mirror for directional thin film deposition, a 3D spring body to displace this mirror without deforming it, and adhesive retaining features for sealing the cavity. The sensor demonstrates a sensitivity of -0.134 nm/psig over a range of 5 – 55 psig and operates with a simple broad band source (BBS) for optical input. Finite element analysis (FEA) agrees well with the observed results and is used to extract a plausible set of material parameters. This device presents a launching point for utilizing the 3D freedom of 2PP microfabrication to advance fiber optic pressure sensors.
J. C. Williams, J. S. Suelzer, N. G. Usechak and H. Chandrahalim, "Optical Fiber-Tip Pressure Sensor Featuring a Spring Body and Multipositional Fabry–Pérot Cavity Resonator," 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville, FL, USA, 2021, pp. 382-385, doi: 10.1109/MEMS51782.2021.9375301.