Optical fiber-tip pressure sensor featuring a spring body and multipositional Fabry–Pérot cavity resonator

Authors

Jeremiah C. Williams, Air Force Institute of Technology
Joseph S. Suelzer, Air Force Research Laboratory
Nicholas G. Usechak, Air Force Research Laboratory
Hengky Chandrahalim, Air Force Institute of TechnologyFollow

Document Type

Conference Proceeding

Publication Date

2021

Abstract

This work presents a pressure sensor utilizing a Fabry–Pérot (FP) resonator fabricated onto the cleaved end of an optical fiber via two-photon polymerization (2PP) micro-fabrication. This technique enables complex three-dimensional (3D) designs with sub-micron resolution and advanced features including: a hinged, multipositional mirror for directional thin film deposition, a 3D spring body to displace this mirror without deforming it, and adhesive retaining features for sealing the cavity. The sensor demonstrates a sensitivity of -0.134 nm/psig over a range of 5 – 55 psig and operates with a simple broad band source (BBS) for optical input. Finite element analysis (FEA) agrees well with the observed results and is used to extract a plausible set of material parameters. This device presents a launching point for utilizing the 3D freedom of 2PP microfabrication to advance fiber optic pressure sensors.

Comments

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DOI

10.1109/MEMS51782.2021.9375301

Source Publication

IEEE

Recommended Citation

J. C. Williams, J. S. Suelzer, N. G. Usechak and H. Chandrahalim, "Optical Fiber-Tip Pressure Sensor Featuring a Spring Body and Multipositional Fabry–Pérot Cavity Resonator," 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville, FL, USA, 2021, pp. 382-385, doi: 10.1109/MEMS51782.2021.9375301.