A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches

Authors

• Benjamin F. Toler, Air Force Institute of Technology
• Ronald A. Coutu Jr., Air Force Institute of Technology
• John W. McBride, University of Southampton

Document Type

Article

Publication Date

10-2013

Comments

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DOI

10.1088/0960-1317/23/10/103001

Source Publication

Journal of Micromechanics and Microengineering (ISSN 0960-1317 | eISSN 1361-6439)

Recommended Citation

Toler, B. F., Coutu Jr., R. A., & McBride, J. W. (2013). A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches. Journal of Micromechanics and Microengineering, 23(10), 103001. https://doi.org/10.1088/0960-1317/23/10/103001