Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor

Authors

• Nathan E. Glauvitz, Air Force Institute of Technology
• Ronald A. Coutu Jr., Air Force Institute of Technology
• Ivan R. Medvedev, Wright State University
• Douglas T. Petkie, Wright State University

Document Type

Article

Publication Date

2-2015

Comments

Copyright © 2015, IEEE

The full article is available from IEEE via subscription or purchase, using the DOI link below.

DOI

10.1109/JMEMS.2014.2327916

Source Publication

Journal of Microelectromechanical Systems (ISSN 1057-7157)

Recommended Citation

N. E. Glauvitz, R. A. Coutu, I. R. Medvedev and D. T. Petkie, "Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor," in Journal of Microelectromechanical Systems, vol. 24, no. 1, pp. 216-223, Feb. 2015, doi: 10.1109/JMEMS.2014.2327916.