Flip bonding with SU-8 for hybrid Al_xGa_1-xAs-polysilicon MEMs-tunable filter

Authors

• Edward M. Ochoa, Air Force Institute of Technology
• LaVern A. Starman, Air Force Institute of Technology
• Robert G. Bedford, Air Force Research Laboratory
• Thomas R. Nelson Jr., Air Force Research Laboratory
• James E. Ehret, Air Force Research Laboratory
• Michael Harvey, USAF
• Travis Anderson, University of Florida
• Fan Ren, University of Florida

Document Type

Article

Publication Date

7-2007

Comments

© 2007 Society of Photo-Optical Instrumentation Engineers (SPIE)

The full article is available from SPIE via subscription or purchase, using the DOI link below.

DOI

10.1117/1.2767326

Source Publication

Journal of Micro/Nanolithography, MEMS, and MOEMS

Recommended Citation

Edward M. Ochoa, Lavern A. Starman, Robert G. Bedford, et al. "Flip bonding with SU-8 for hybrid AlxGa1-xAs-polysilicon MEMs-tunable filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(3), 033007 (1 Jul 2007) https://doi.org/10.1117/1.2767326