Demonstration of hybrid Al_xGa_1-xAs-polysilicon microelectromechanical tunable filter

Authors

Edward M. Ochoa, Air Force Institute of Technology
Thomas R. Nelson Jr., Air Force Research Laboratory
Robert G. Bedford, Air Force Research Laboratory
James E. Ehret, Air Force Research Laboratory
LaVerne A. Starman, Air Force Institute of Technology
Michael Harvey, Force Space and Missile Systems Center
Travis Anderson, University of Florida
Fan Ren, University of Florida

Document Type

Article

Publication Date

3-2007

Comments

Copyright © 2007, IEEE

Plain-text title form: Demonstration of hybrid AlxGa1-xAs-polysilicon microelectromechanical tunable filter

Co-author E. Ochoa was an AFIT PhD candidate at the time of this article's publication. (AFIT-DS-ENG-07-23, September 2007)

DOI

10.1109/LPT.2007.891942

Source Publication

IEEE Photonics Technology Letters (ISSN 1041-1135)

Recommended Citation

E. Ochoa et al., "Demonstration of Hybrid Al x Ga 1−x As–Polysilicon Microelectromechanical Tunable Filter," in IEEE Photonics Technology Letters, vol. 19, no. 6, pp. 381-383, March15, 2007, doi: 10.1109/LPT.2007.891942.