"Contact resistance study of noble metals and alloy films using a scann" by L. Chen, H. Lee et al. 10.1063/1.2785951">
 

Contact resistance study of noble metals and alloy films using a scanning probe microscope test station

Document Type

Article

Publication Date

10-1-2007

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Source Publication

Journal of Applied Physics (ISSN 0021-8979, 1089-7550)

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