Contact resistance study of noble metals and alloy films using a scanning probe microscope test station
Document Type
Article
Publication Date
10-1-2007
Source Publication
Journal of Applied Physics (ISSN 0021-8979, 1089-7550)
Recommended Citation
L. Chen, H. Lee, Z. J. Guo, N. E. McGruer, K. W. Gilbert, S. Mall, K. D. Leedy, G. G. Adams; Contact resistance study of noble metals and alloy films using a scanning probe microscope test station. J. Appl. Phys. 1 October 2007; 102 (7): 074910. https://doi.org/10.1063/1.2785951
COinS
Comments
This article is accessible by subscription.