Integrating nanosphere lithography in device fabrication

Authors

Tod V. Laurvick, Air Force Institute of Technology
Ronald A. Coutu Jr., Air Force Institute of Technology
Robert A. Lake, Air Force Institute of Technology

Document Type

Conference Proceeding

Publication Date

3-21-2016

Comments

Copyright © 2016 Society of Photo-Optical Instrumentation Engineers (SPIE).

This conference paper is available through subscription or purchase from the publisher, SPIE, using the DOI link below.

Event: SPIE Advanced Lithography, 2016, San Jose

DOI

10.1117/12.2218562

Source Publication

Proceedings of SPIE Vol. 9779, Advances in Patterning Materials and Processes XXXIII

Recommended Citation

Tod V. Laurvick, Ronald A. Coutu Jr., and Robert A. Lake "Integrating nanosphere lithography in device fabrication", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97791S (21 March 2016); https://doi.org/10.1117/12.2218562