Abstract
A passive microscopic Fabry-Pérot Interferometer (FPI) pressure sensor includes an optical fiber and a three-dimensional microscopic optical enclosure. The three-dimensional microscopic optical enclosure includes tubular side walls having lateral pleated corrugations and attached to a cleaved tip of the optical fiber to receive a light signal. An optically reflecting end wall is distally engaged to the tubular side walls to enclose a trapped quantity of gas that longitudinally positions the optically reflecting end wall in relation to ambient air pressure, changing a distance traveled by a light signal reflected back through the optical fiber.
Document Type
Patent
Status
Active
Issue Date
5-10-2022
Patent Number
US 11326970 B2 [ 11,326,970 ]
CPC Classification
G01L11/02; G02B6/293
Application number
17/229,986
Assignees
United States of America as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )
Filing Date
4-14-2021
Recommended Citation
Williams, Jeremiah C., and Hengky Chandrahalim. Monolithically Integrated Microscale Pressure Sensor on an Optical Fiber Tip. United States Patent 11326970 (B2), issued 10 May 2022. https://scholar.afit.edu/patents/7
Included in
Engineering Science and Materials Commons, Nanoscience and Nanotechnology Commons, Optics Commons, Semiconductor and Optical Materials Commons
Comments
This patent was previously hosted on AFIT Scholar in the Faculty Publications collection.