Abstract
A method of making passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes forming a three-dimensional microscopic optical structure on a cleaved tip of an optical fiber that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.
Document Type
Patent
Status
Active
Issue Date
10-26-2021
Patent Number
US 11156782 B2 [ 11,156,782 ]
CPC Classification
G02B6/29359
Application number
17/136,564
Assignees
United States of America as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )
Filing Date
12-29-2020
Recommended Citation
Chandrahalim, Hengky, and Jonathan W. Smith. Method of Making Temperature-immune Self-referencing Fabry–Pérot Cavity Sensors. United States Patent 11156782 (B2), issued 26 October 2021. https://scholar.afit.edu/patents/6
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Electronic Devices and Semiconductor Manufacturing Commons, Engineering Science and Materials Commons, Nanoscience and Nanotechnology Commons, Optics Commons, Semiconductor and Optical Materials Commons