Document Type
Patent
Publication Date
5-10-2022
Abstract
A passive microscopic Fabry-Pérot Interferometer (FPI) pressure sensor includes an optical fiber and a three-dimensional microscopic optical enclosure. The three-dimensional microscopic optical enclosure includes tubular side walls having lateral pleated corrugations and attached to a cleaved tip of the optical fiber to receive a light signal. An optically reflecting end wall is distally engaged to the tubular side walls to enclose a trapped quantity of gas that longitudinally positions the optically reflecting end wall in relation to ambient air pressure, changing a distance traveled by a light signal reflected back through the optical fiber.
Source Publication
USPTO
Recommended Citation
Williams, Jeremiah C. and Chandrahalim, Hengky, "Monolithically integrated microscale pressure sensor on an optical fiber tip [U.S. Patent US11326970B2]" (2022). Faculty Publications. 961.
https://scholar.afit.edu/facpub/961
Included in
Biomedical Engineering and Bioengineering Commons, Chemical Engineering Commons, Electrical and Computer Engineering Commons, Engineering Physics Commons, Engineering Science and Materials Commons, Materials Science and Engineering Commons, Mechanical Engineering Commons, Nanoscience and Nanotechnology Commons, Optics Commons
Comments
U.S. Patent US11326970B2