Monolithically integrated microscale pressure sensor on an optical fiber tip [U.S. Patent US11326970B2]
U.S. Patent US11326970B2
Abstract
A passive microscopic Fabry-Pérot Interferometer (FPI) pressure sensor includes an optical fiber and a three-dimensional microscopic optical enclosure. The three-dimensional microscopic optical enclosure includes tubular side walls having lateral pleated corrugations and attached to a cleaved tip of the optical fiber to receive a light signal. An optically reflecting end wall is distally engaged to the tubular side walls to enclose a trapped quantity of gas that longitudinally positions the optically reflecting end wall in relation to ambient air pressure, changing a distance traveled by a light signal reflected back through the optical fiber.
This paper has been withdrawn.