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Herein, a two-photon nanostructuring process that is employed to monolithically integrate dynamic three-dimensional (3D) micromechanical features into Fabry–Pérot cavity (FPC) sensors on an optical fiber tip is demonstrated. These features represent a breakthrough in the integration and fabrication capabilities of micro optomechanical devices and systems. The demonstrated dynamic optical surface enables directional thin-film deposition onto obscured areas. The rotation of the dynamically movable mirror to deposit a thin reflective coating onto the inner surfaces of a FPC with curved geometry is leveraged. The reflective coating in conjunction with the dynamically rotatable mirror greatly improves the quality factor of the FPC and enables a new class of highly integrated multipurpose sensor systems. A unique open cavity geometry on an optical fiber tip is used to demonstrate temperature and refractive index sensing with sensitivities of 2045 ± 39 nm/RIU and 366 ± 22 pm °C−1, respectively. A gold reflective coating sputtered onto the inner surfaces of the FPC improves the quality factors of the cavity by more than 800%. This technology presents a path forward for utilizing 3D design freedom in micromechanically enhanced optical systems to facilitate versatile processing and advantageous geometries beyond the current state of the art.


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Advanced Photonics Research