Two-Photon Nanomachining of a Micromechanically Enhanced Optical Cavity Sensor on an Optical Fiber Tip
Document Type
Article
Publication Date
7-2022
Abstract
Herein, a two-photon nanostructuring process that is employed to monolithically integrate dynamic three-dimensional (3D) micromechanical features into Fabry–Pérot cavity (FPC) sensors on an optical fiber tip is demonstrated. These features represent a breakthrough in the integration and fabrication capabilities of micro optomechanical devices and systems. The demonstrated dynamic optical surface enables directional thin-film deposition onto obscured areas. The rotation of the dynamically movable mirror to deposit a thin reflective coating onto the inner surfaces of a FPC with curved geometry is leveraged. The reflective coating in conjunction with the dynamically rotatable mirror greatly improves the quality factor of the FPC and enables a new class of highly integrated multipurpose sensor systems. A unique open cavity geometry on an optical fiber tip is used to demonstrate temperature and refractive index sensing with sensitivities of 2045 ± 39 nm/RIU and 366 ± 22 pm °C−1, respectively. A gold reflective coating sputtered onto the inner surfaces of the FPC improves the quality factors of the cavity by more than 800%. This technology presents a path forward for utilizing 3D design freedom in micromechanically enhanced optical systems to facilitate versatile processing and advantageous geometries beyond the current state of the art.
DOI
10.1002/adpr.202100359
Source Publication
Advanced Photonics Research
Recommended Citation
Williams, J. C., Chandrahalim, H., Suelzer, J. S., & Usechak, N. G. (2022). Two‐Photon Nanomachining of a Micromechanically Enhanced Optical Cavity Sensor on an Optical Fiber Tip. Advanced Photonics Research, 3(7), 2100359. https://doi.org/10.1002/adpr.202100359
Comments
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