Method of making temperature-immune self-referencing Fabry–Pérot cavity sensors

Hengky Chandrahalim, Air Force Institute of Technology
Jonathan W. Smith, Air Force Institute of Technology

United States Patent# 11,156,782 (US11156782).

Assignee: United States of America as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )

Abstract

A method of making passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes forming a three-dimensional microscopic optical structure on a cleaved tip of an optical fiber that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.