Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices
Document Type
Article
Publication Date
10-2012
Abstract
Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrothermal actuators have been dynamically tested to determine and compare the responses of devices from both processes. Furthermore, the integration of these devices into a safe and arming device were tested and investigated for each process. Initial results indicate that the SUMMiT devices provide the most optimum results based on consistency of operation and reliability.
Source Publication
Experimental Mechanics (ISSN 0014-4851 | e-ISSN 1741-2765)
Recommended Citation
Ostrow, S.A., Lake, R.A., Lombardi, J.P. et al. Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices. Exp Mech 52, 1229–1238 (2012). https://doi.org/10.1007/s11340-011-9579-8
Comments
© Society for Experimental Mechanics (outside the USA) 2012
This article appears in volume 56 of Experimental Mechanics as cited, and is is accessible by subscription through the DOI link just below.