Integrated PiezoMEMS actuators and sensors
Document Type
Conference Proceeding
Publication Date
2010
Abstract
The ability to combine both actuation and sensing technologies into one unified MEMS fabrication process is enabling for a wide variety of applications including high frequency filters, transformers and mm-scale robotics. This research demonstrates piezoelectric MEMS (PiezoMEMS) devices based on lead zirconate titanate (PZT) thin films including switchable resonators, transformers, and microflight actuators with integrated strain sensors. PiezoMEMS resonators and transformers combine actuation and sensing on a single device platform. Current research on PZT based resonators is focused on optimizing the performance for both high quality factor, Q, and low motional resistance. Resonators in the low tens of MHz can also be utilized as piezoelectric resonant transformers and are predicted to achieve AC/DC gains in the range of 2 to 8. In addition, strain sensors positioned at the cantilever root of PiezoMEMS microflight actuators provide direct feedback of the motional response of the actuated wing.
Source Publication
IEEE Sensors 2010
Recommended Citation
Ronald G. Polcawich, Jeffrey S. Pulskamp, Sarah Bedair, Gabriel Smith, Roger Kaul, Chris Kroninger, Eric Wetzel, Hengky Chandrahalim, and Sunil A. Bhave, "Integrated PiezoMEMS actuators and sensors," IEEE Sensors Conference, 2010, pp. 2193-2196.
Comments
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