Hybrid fabrication techniques of 3-D integrated microlaser sensors
We present the recent developments of mechanically, thermally, and chemically robust, 3-D monolithically integrated sustainable and versatile microlasers for various sensing applications, fabricated by ultrafast laser inscription and standard lithography processes.
Advanced Photonics Congress 2017
Hengky Chandrahalim and Xudong Fan, "Hybrid fabrication techniques of 3-D integrated microlaser sensors," Advanced Photonics Congress 2017, pp. SeM2E.1.