Hybrid fabrication techniques of 3-D integrated microlaser sensors

Authors

Hengky Chandrahalim, Air Force Institute of TechnologyFollow
Xudong Fan, University of Michigan-Ann Arbor

Document Type

Conference Proceeding

Publication Date

2017

Abstract

We present the recent developments of mechanically, thermally, and chemically robust, 3-D monolithically integrated sustainable and versatile microlasers for various sensing applications, fabricated by ultrafast laser inscription and standard lithography processes.

Comments

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DOI

10.1364/SENSORS.2017.SeM2E.1

Source Publication

Advanced Photonics Congress 2017

Recommended Citation

Hengky Chandrahalim and Xudong Fan, "Hybrid fabrication techniques of 3-D integrated microlaser sensors," Advanced Photonics Congress 2017, pp. SeM2E.1.