Aqueous transduction of poly-SiGe disk resonators
This paper demonstrates an electrostatic transducer for lateral contour-mode resonators in which the transduction gaps are filled with a liquid dielectric (water) having much higher permittivity than air (Κwater = 80.1). Aqueous transduction is more efficient than air-gap transduction (lower motional impedance) and has a higher frequency tuning range compared than solid-dielectric transduction. We have demonstrated a 42 MHz poly-SiGe disk resonator with deionized (Dl) water confined to the electrode gaps. The resonator has a measured quality factor (Q) of 3,800, motional impedance (Rx) of 3.9 kΩ and 3% series frequency tuning range.
2007 International Solid-State Sensors, Actuators and Microsystems Conference (IEEE Transducers 2007)
Hengky Chandrahalim, Sunil A. Bhave, Emmanuel Quevy, and Roger T. Howe, "Aqueous transduction of poly-SiGe disk resonators," International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), 2007, pp. 313-316.