Aqueous transduction of poly-SiGe disk resonators

Authors

Hengky Chandrahalim, Air Force Institute of TechnologyFollow
Sunil A. Bhave, Purdue University
Emmanuel P. Quevy, Silicon Clocks, Inc.
Roger T. Howe, Stanford University

Document Type

Conference Proceeding

Publication Date

2007

Abstract

This paper demonstrates an electrostatic transducer for lateral contour-mode resonators in which the transduction gaps are filled with a liquid dielectric (water) having much higher permittivity than air (Κ_water = 80.1). Aqueous transduction is more efficient than air-gap transduction (lower motional impedance) and has a higher frequency tuning range compared than solid-dielectric transduction. We have demonstrated a 42 MHz poly-SiGe disk resonator with deionized (Dl) water confined to the electrode gaps. The resonator has a measured quality factor (Q) of 3,800, motional impedance (R_x) of 3.9 kΩ and 3% series frequency tuning range.

Comments

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DOI

10.1109/SENSOR.2007.4300131

Source Publication

2007 International Solid-State Sensors, Actuators and Microsystems Conference (IEEE Transducers 2007)

Recommended Citation

Hengky Chandrahalim, Sunil A. Bhave, Emmanuel Quevy, and Roger T. Howe, "Aqueous transduction of poly-SiGe disk resonators," International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), 2007, pp. 313-316.