Silicon carbide high temperature MEMS capacitive strain sensor

Authors

• Richard P. Weisenberger, Air Force Research Laboratory
• Ronald A. Coutu Jr., Air Force Institute of Technology
• LaVern A. Starman, Air Force Institute of Technology

Document Type

Conference Proceeding

Publication Date

8-10-2012

Comments

© 2013 The Society for Experimental Mechanics

The full conference paper is available via subscription or purchase, using the DOI link below.

Event: 2012 Annual Conference on Experimental and Applied Mechanics

DOI

10.1007/978-1-4614-4436-7_1

Source Publication

MEMS and Nanotechnology, Volume 6 : Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics

Recommended Citation

Weisenberger, R.P., Coutu, R.A., Starman, L.A. (2013). Silicon Carbide High Temperature MEMS Capacitive Strain Sensor. In: Shaw, G., Prorok, B., Starman, L. (eds) MEMS and Nanotechnology, Volume 6. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4436-7_1