Terahertz metamaterial structures fabricated by PolyMUMPs
Document Type
Conference Proceeding
Publication Date
5-13-2011
Source Publication
MEMS and Nanotechnology, Volume 4 : Proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics
Recommended Citation
Moore, E. A., Langley, D., & Coutu, R. A. (2025). Terahertz metamaterial structures fabricated by polymumps. In T. Proulx, MEMS and Nanotechnology, Volume 4 (pp. 145–150). River Publishers. https://doi.org/10.1007/978-1-4614-0210-7_21
COinS
Comments
© 2011 Taylor & Francis, Inc.
Co-author D. Langley was an AFIT PhD student at the time of this conference. (AFIT-DEE-ENG-12-04, June 2012)