Electrostatically Tunable Meta-Atoms Integrated With In Situ Fabricated MEMS Cantilever Beam Arrays

Authors

Ronald A. Coutu Jr., Air Force Institute of Technology
Peter J. Collins, Air Force Institute of Technology
Elizabeth A. Moore, Air Force Institute of Technology
Derrick Langley, Air Force Institute of Technology
Matthew E. Jussaume, United States Air Force Academy
LaVerne A. Starman, Air Force Institute of Technology

Document Type

Article

Publication Date

12-1-2011

Comments

Co-author D. Langeley was an AFIT PhD candidate at the time of this publication. (AFIT-DEE-ENG-12-04, June 2012)

DOI

10.1109/JMEMS.2011.2167659

Source Publication

Journal of Microelectromechanical Systems (ISSN 1057-7157)

Recommended Citation

R. A. Coutu, P. J. Collins, E. A. Moore, D. Langley, M. E. Jussaume and L. A. Starman, "Electrostatically Tunable Meta-Atoms Integrated With In Situ Fabricated MEMS Cantilever Beam Arrays," in Journal of Microelectromechanical Systems, vol. 20, no. 6, pp. 1366-1371, Dec. 2011, doi: 10.1109/JMEMS.2011.2167659.