A novel process for the fabrication of microstructures half the listed minimum feature size of a direct-write laser lithography system
Document Type
Conference Proceeding
Publication Date
3-7-2014
Source Publication
Proceedings of SPIE, vol. 8973: Micromachining and Microfabrication Process Technology XIX
Recommended Citation
Robert A. Lake and Ronald A. Coutu Jr. "A novel process for the fabrication of microstructures half the listed minimum feature size of a direct-write laser lithography system", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730B (7 March 2014); https://doi.org/10.1117/12.2037366
Comments
Copyright © 2014 Society of Photo-Optical Instrumentation Engineers (SPIE).
This conference paper is published by SPIE and is accessible by subscription or purchase using the DOI link on this page.
Author note: Robert Lake was an AFIT PhD student at the time of this conference. (AFIT-ENG-DS-15-S-013, September 2015)