"A novel process for the fabrication of microstructures half the listed" by Robert A. Lake and Ronald A. Coutu Jr. 10.1117/12.2037366">
 

A novel process for the fabrication of microstructures half the listed minimum feature size of a direct-write laser lithography system

Document Type

Conference Proceeding

Publication Date

3-7-2014

Comments

Copyright © 2014 Society of Photo-Optical Instrumentation Engineers (SPIE).

This conference paper is published by SPIE and is accessible by subscription or purchase using the DOI link on this page.

Author note: Robert Lake was an AFIT PhD student at the time of this conference. (AFIT-ENG-DS-15-S-013, September 2015)

Source Publication

Proceedings of SPIE, vol. 8973: Micromachining and Microfabrication Process Technology XIX

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