Selecting metal alloy electric contact materials for MEMS switches

Authors

Ronald A. Coutu Jr., Air Force Institute of Technology
Paul E. Kladitis, Air Force Institute of Technology
Kevin D. Leedy, Air Force Research Laboratory
Robert L. Crane, Air Force Research Laboratory

Document Type

Article

Publication Date

8-2004

Comments

This article is accessible by subscription.

DOI

10.1088/0960-1317/14/8/006

Source Publication

Journal of Micromechanics and Microengineering (ISSN 0960-1317, 1361-6439)

Recommended Citation

Ronald A Coutu Jr et al 2004 J. Micromech. Microeng. 14 1157