Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing

Authors

David D. Lynes, Air Force Institute of Technology
Hengky Chandrahalim, Air Force Institute of Technology

Document Type

Conference Proceeding

Publication Date

10-20-2024

Comments

This conference paper is available to IEEE subscribers through the DOI link below.

DOI

10.1109/SENSORS60989.2024.10784658

Source Publication

IEEE Sensors 2024

Recommended Citation

D. D. Lynes and H. Chandrahalim, "Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing," 2024 IEEE SENSORS, Kobe, Japan, 2024, pp. 1-4, doi: 10.1109/SENSORS60989.2024.10784658.