Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing

Authors

David D. Lynes, Air Force Institute of Technology
Hengky Chandrahalim, Air Force Institute of Technology

Document Type

Conference Proceeding

Publication Date

10-20-2024

Abstract

Microelectromechanical systems (MEMS) resonators are ideal for low-power, compact, and cost-effective sensing due to their small size and low power consumption. In this study, dual-mode Aluminum Nitride (AlN) transduced MEMS resonators were designed and characterized over a broad temperature range from -200°C to +200 °C. A systematic study was conducted to evaluate the influence of a silicon oxide (SiO₂) thin film on the MEMS resonators' quality factors (Q-factors) and temperature coefficient of frequency (TCF). The two adjacent mechanical modes consistently shifted together across the entire temperature range, enabling temperature-independent self-referencing for enhanced environmental sensing. The addition of the oxide film increased the quality factor of the resonators by more than 500%, significantly improving their sensitivity to various environmental phenomena. Abstract © IEEE.

Comments

This conference paper is available to IEEE subscribers through the DOI link below.

DOI

10.1109/SENSORS60989.2024.10784658

Source Publication

IEEE Sensors 2024

Recommended Citation

D. D. Lynes and H. Chandrahalim, "Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing," 2024 IEEE SENSORS, Kobe, Japan, 2024, pp. 1-4, doi: 10.1109/SENSORS60989.2024.10784658.