Abstract
A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.
Document Type
Patent
Status
Active
Issue Date
3-29-2022
Patent Number
US 11287575 B2 [ 11,287,575 ]
CPC Classification
G01L7/065
Application number
17/236,028
Assignees
United States of America as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )
Filing Date
3-29-2022
Recommended Citation
Williams, Jeremiah C. and Hengky Chandrahalim. Method of Making Hinged Self-referencing Fabry–Pérot Cavity Sensors. United States Patent 11287575 (B2), issued 9 March 2022. https://scholar.afit.edu/patents/5
Included in
Electronic Devices and Semiconductor Manufacturing Commons, Engineering Science and Materials Commons, Nanoscience and Nanotechnology Commons, Optics Commons, Semiconductor and Optical Materials Commons
Comments
This patent was previously hosted on AFIT Scholar in the Faculty Publications collection.