Abstract

A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.

Document Type

Patent

Status

Active

Issue Date

5-3-2022

Patent Number

US 11320596 B2 [ 11,320,596 ]

CPC Classification

G02B6/29359

Application number

17/237,128

Assignees

Government of the United States, as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )

Filing Date

4-22-2021

Comments

This patent was previously hosted on AFIT Scholar in the Faculty Publications collection.

Share

COinS