Abstract
A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.
Document Type
Patent
Status
Active
Issue Date
5-3-2022
Patent Number
US 11320596 B2 [ 11,320,596 ]
CPC Classification
G02B6/29359
Application number
17/237,128
Assignees
Government of the United States, as represented by the Secretary of the Air Force , Wright - Patterson AFB , OH ( US )
Filing Date
4-22-2021
Recommended Citation
Williams, Jeremiah C. and Hengky Chandrahalim. Hinged Temperature-immune Self-referencing Fabry–Pérot Cavity Sensors. United States Patent 11320596 (B2), issued 3 May 2022. https://scholar.afit.edu/patents/3
Included in
Electrical and Electronics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanoscience and Nanotechnology Commons, Optics Commons, Semiconductor and Optical Materials Commons
Comments
This patent was previously hosted on AFIT Scholar in the Faculty Publications collection.