Abstract

A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results of 1.02.x108 and 2.70.x108 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.

Document Type

Patent

Status

Issued

Issue Date

6-26-2007

Patent Number

US 7235750 B1 [7,235,750]

CPC Classification

H01H59/0009

Application number

11/047344

Assignees

Government of the United States, as represented by the Secretary of the Air Force, Washington, DC (US)

Filing Date

1-31-2005

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