Abstract
A method of enhancing an electromechanical coupling coefficient of a microelectromechanical (“MEMS”) device. The method includes applying, to a fully fabricated MEMS device, heavy particle ion radiation to the MEMS device at a fluence of at least 1×1014 cm.−2. According to other embodiments of the present invention are directed to a bandpass filter comprising a plurality of MEMS devices fabricated in accordance with the methods provided. The MEMS of the plurality are electronically or mechanically coupled.
Document Type
Patent
Status
Issued
Issue Date
6-23-2026
Patent Number
12665562 B2 [ 12,665,562 ]
CPC Classification
H 03 H 3/0072
Application number
18/584,112
Assignees
United States of America as represented by the Secretary of the Air Force
Filing Date
2-22-2024
Recommended Citation
Chandrahalim, H. & Lynes, D. (2026, June 23). Ion irradiation of microelectromechanical resonators. United States Patent 12,665,562
Included in
Electro-Mechanical Systems Commons, Electronic Devices and Semiconductor Manufacturing Commons