Title

Digitally Programmable RF MEMS Filters with Mechanically Coupled Resonators

Authors

Hengky Chandrahalim, Air Force Institute of TechnologyFollow
Sunil A. Bhave

Document Type

Patent

Publication Date

3-5-2013

Abstract

A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and a last resonator of the mechanically coupled resonator array such that motional boundary conditions for the at least first resonator and last resonator are selectable in proportion to the DC bias voltage.

Comments

United States Patent 8390398 (US8390398 B2).

Source Publication

USPTO

Recommended Citation

Chandrahalim, Hengky and Bhave, Sunil A., "Digitally Programmable RF MEMS Filters with Mechanically Coupled Resonators" (2013). Faculty Publications. 882.
https://scholar.afit.edu/facpub/882