3-D Thermal radiation sensors on optical fiber tips fabricated using ultrashort laser pulses
This work demonstrates the first 3-D thermal radiation sensors on optical fiber tips with excellent linear response and sensitivity over a broad range of temperature. A two-photon polymerization (2PP) process was employed to create 3-D thermally responsive structures with submicron precision on fiber tips. This process allows for a single-step writing, maskless, rapid, and low-cost fabrication process to realize sensors with maximum exposure and response to heat radiation. It also enables the integration of packaging-free and ready to use sensors on the tip of unconventional substrates, such as optical fiber tips. The released sensor showed linear response over the temperature range of 20-120 °C; temperature sensitivity of ~50 pm/°C at around 1550 nm wavelength; and sensitivity improvement of better than 900% compared to the unreleased sensors.
The 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)
Jonathan W. Smith, Joe S. Suelzer, Nicholas G. Usechak, Vincent P. Tondiglia, and Hengky Chandrahalim, "3-D Thermal radiation sensors on optical fiber tips fabricated using ultrashortlaser pulses," International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’19), 2019.