3-D Thermal radiation sensors on optical fiber tips fabricated using ultrashort laser pulses

Document Type

Conference Proceeding

Publication Date



This work demonstrates the first 3-D thermal radiation sensors on optical fiber tips with excellent linear response and sensitivity over a broad range of temperature. A two-photon polymerization (2PP) process was employed to create 3-D thermally responsive structures with submicron precision on fiber tips. This process allows for a single-step writing, maskless, rapid, and low-cost fabrication process to realize sensors with maximum exposure and response to heat radiation. It also enables the integration of packaging-free and ready to use sensors on the tip of unconventional substrates, such as optical fiber tips. The released sensor showed linear response over the temperature range of 20-120 °C; temperature sensitivity of ~50 pm/°C at around 1550 nm wavelength; and sensitivity improvement of better than 900% compared to the unreleased sensors.


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Source Publication

The 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)