Monolithically integrated piezoMEMS SP2T switch and contour-mode filters

Document Type

Conference Proceeding

Publication Date



This paper provides the first experimental demonstration of monolithically integrated piezoelectric MEMS RF switches with contour mode filters. Lead zirconate titanate (PZT) thin films are utilized to enable both low-voltage switch operation and filter tunability. This research leverages previous work using PZT actuators for low-voltage, wide-band switches and PZT transduced silicon resonators. The two device technologies are combined using a hybrid fabrication process that combines the key components of each device fabrication into a single unified process using silicon-on-insulator (SOI) substrates. The voltage tunable and switchable PiezoMEMS filter array provides a drop-in solution for frequency-agile channel selectivity.


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Source Publication

22nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2009)