MEMS filter with voltage-tunable center frequency and bandwidth
This paper reports on the design of a reconfigurable ladder filter using RF MEMS resonators with voltage-tunable series and parallel resonance frequencies. The ladder filter consists of one shunt and two series resonators operating in the half-wave thickness shear vibration mode. It demonstrates a center frequency tuning range of 8 MHz at 817 MHz and an adjustable bandwidth from 600 kHz to 2.8 MHz, while maintaining an insertion loss < 4 dB, stop-band rejection > 30 dB and pass-band ripple < 2 dB. This voltage tunable design enables channel agility and reconfigurability, substantially reducing the filter count in channel-select radio receiver architectures. Finally, a simple algorithm is provided to facilitate dynamic tuning of filter center frequency and bandwidth.
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Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2006)
Lih Feng Cheow, Hengky Chandrahalim, and Sunil A. Bhave, "MEMS filter with voltage-tunable center frequency and bandwidth," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2006), 2006, pp. 304-307.