Title

Effects of Hydrogen Pretreatment on Physical-Vapor-Deposited Nickel Catalyst for Multi-Walled Carbon Nanotube Growth

Document Type

Article

Publication Date

2-1-2010

Abstract

Physical vapor deposited nickel catalyst layers of 10, 50, 100, 200, 350, and 500 angstroms were granulated using hydrogen plasma for varying times to determine an effective carbon nanotube (CNT) growth process using microwave plasma enhanced CVD (MPECVD). Nickel was deposited via sputtering or evaporation. The catalyst granule size, density, and resulting CNTs were analyzed. Sputtered nickel of 50 angstroms with 5 minutes of hydrogen plasma pretreatment resulted in the most effective CNT growth.
Abstract © SPIE

Comments

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DOI

10.1117/1.3356218

Source Publication

Journal of Nanophotonics

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