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Conference Proceeding

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This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations.


The publisher's version of record can be found at MDPI:
Underwood, G., & Laurvick, T. (2018). MEMS Variable Area Capacitor for Room Temperature Electrometry. Proceedings, 2(13), 1075.

This article belongs to the Proceedings of Eurosensors 2018, (Graz, Austria, September 9-12, 2018).

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. CC BY 4.0 (



Source Publication

Proceedings (ISSN: 2504-3900)