A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to a flow rate.
Chandrahalim, Hengky and Williams, Jeremiah C., "Optical fiber tip micro anemometer [U.S. Patent US11635315B2]" (2023). Faculty Publications. 1130.
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Patent No.: US 11,635,315 B2
Date of Patent: Apr. 25, 2023