Date of Award
6-2025
Document Type
Thesis
Degree Name
Master of Science in Applied Physics
Department
Department of Engineering Physics
First Advisor
Hengky Chandrahalim, PhD
Abstract
Gravimeters are devices that measure gravitational acceleration which can be used by the United States Air Force (USAF) in the areas of navigation and remote sensing. Fused-silica microelectromechanical systems (MEMS) devices offer capabilities to make inexpensive relative gravimeters with higher thermal stability than common silicon devices while maintaining good gravitational sensitivity. The fused-silica devices in this research were designed, simulated, fabricated, and tested to observe their performance as gravimeters. The devices exhibit properties of highly sensitive accelerometers but the current designs do not qualify as gravimeters. This study provides information to improve the sensitivity and stability of these fused-silica MEMS devices for implementation as gravimeters in many defense and commercial applications.
AFIT Designator
FY25-AFIT-ENP-MS-J-004
Recommended Citation
Doerstling, Ethan, "Fused-Silica Microelectromechanical Systems for Relative Gravimetry" (2025). Theses and Dissertations. 8342.
https://scholar.afit.edu/etd/8342
Included in
Atomic, Molecular and Optical Physics Commons, Electromagnetics and Photonics Commons, Electro-Mechanical Systems Commons
Comments
An embargo was observed for posting this thesis on AFIT Scholar.
Approved for public release, distribution unlimited. PA case number 88ABW-2025-0570