Date of Award

3-23-2017

Document Type

Thesis

Degree Name

Master of Science in Materials Science

Department

Department of Engineering Physics

First Advisor

Manuel Ferdinandus, PhD.

Abstract

nitride (TiN) and scandium nitride (ScN), using the beam deflection characterization technique. The thin films were made at the Air Force Research Lab by controllably unbalanced magnetron sputtering. Transition metal nitrides, specifically TiN, are used widely in industry because of their unique properties, including extreme hardness and high damage threshold. The properties of thin film transition metal nitrites are dependent on the chemical structure of the thin film, which can be heavily influenced by substrate and deposition method. This durability and tunability is an asset in applications such as sensor protection and all optical computing. Two substrates, sapphire (Al2O3) and magnesium oxide (MgO), were investigated. Two deposition parameters, 50V and 100V, were investigated. The substrate nor deposition parameter significantly affect the nonlinear optical properties.

AFIT Designator

AFIT-ENP-MS-17-M-106

DTIC Accession Number

AD1051599

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