Cation Production and Reactions Induced by Electron Impact on Tetraethoxysilane

Author

Jeremy C. Holtgrave

Date of Award

12-1992

Document Type

Thesis

Degree Name

Master of Science

Department

Department of Engineering Physics

First Advisor

Peter Haaland, PhD

Abstract

The production of cations by electron impact on tetraethoxysilane (TEOS) is studied with a Fourier Transform mass spectrometer (FTMS). The operating principles of FTMS are reviewed and the experimental approach to the mass calibration and cross-section measurement is discussed. The cross-sections for total and partial ionization of Si(OC₂H₅)₄ from threshold to 50 eV are measured. Also, the ion chemistry resulting from interactions between ions and neutral TEOS is examined.

AFIT Designator

AFIT-GEP-ENP-92D-06

DTIC Accession Number

ADA258830

Comments

The author's Vita page is omitted.

Recommended Citation

Holtgrave, Jeremy C., "Cation Production and Reactions Induced by Electron Impact on Tetraethoxysilane" (1992). Theses and Dissertations. 7186.
https://scholar.afit.edu/etd/7186