Date of Award

12-1996

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

Department

Department of Electrical and Computer Engineering

First Advisor

Victor M. Bright, PhD

Abstract

Microelectromechainical systems (MEMS) is a rapidly expanding field of research into the design and fabrication of actuated mechanical systems on the order of a few micrometers to a few millimeters. MEMS potentially offers new methods to solve a variety of engineering problems. A large variety of MEMS systems including flip-up platforms, scanning micromirrors, and rotating micromirrors are developed to demonstrate the types of MEMS that can be fabricated. The potential of MEMS for reducing the vibration sensitivity of surface acoustic wave and surface transverse wave resonators is then evaluated. A micromachined vibration isolation system is designed and modeled. A fabrication process utilizing two sided anisotropic etching of {110} silicon wafers is developed. The process utilizes standard microelectronic fabrication equipment to batch fabricate the isolation systems. The fabricated systems are only 1 cm by 1 cm by 1 mm. Several oscillators are fabricated using commercially fabricated STW resonators mounted on the isolation systems. The resonators are driven by their standard oscillator circuit. Incorporating the isolation system into the oscillator does not result in an appreciable increase the size or the weight of the oscillator. Testing of the oscillators shows that the isolators successfully function as passive vibration isolation systems.

AFIT Designator

AFIT-DS-ENG-96-12

DTIC Accession Number

ADA321364

Download

Share

COinS