Date of Award
3-2022
Document Type
Thesis
Degree Name
Master of Science
Department
Department of Electrical and Computer Engineering
First Advisor
Matthew J. Vincie, PhD
Abstract
Micro-Electro-Mechanical Systems (MEMS) are devices that play important roles of sensing and actuation in many different industries including automation, electronics, medical, communications, and defense. In order to make full use of these devices, it is important to understand the peripherals that enable these devices. Simultaneous actuation and control of MEMS devices is an important area of research as it enables feedback control of these device and allows devices to maintain performance as devices depreciate over their lifetime. The aim of this thesis is to perform a design space analysis on an electrostatic MEMS simultaneous actuation and sensing circuit that is driven by a Pulse Width Modulated (PWM) signal and sensed by a capacitor divider interface circuit. A new variant to the capacitor divider interface is discussed and takes advantage of the leakage problem associated with this circuit. Furthermore, the important design variables and their impacts are investigated. The results found here in are generalized and may be applied to any electrostatic MEMS device.
AFIT Designator
AFIT-ENG-MS-22-M-063
DTIC Accession Number
AD1166926
Recommended Citation
Song, Jacob E., "Simultaneous Actuation and Sensing of Electrostatic MEMS" (2022). Theses and Dissertations. 5359.
https://scholar.afit.edu/etd/5359