Date of Award

12-22-2016

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

Department

Department of Electrical and Computer Engineering

First Advisor

Robert A. Lake, PhD.

Abstract

Microelectromechanical Systems (MEMS) based devices, and specifically microswitches, continue to offer many advantages over competing technologies. To realize the benefits of micro-switches, improvements must be made to address performance and reliability shortfalls which have long been an issue with this application. To improve the performance of these devices, the micro-contacts used in this technology must be understood to allow for design improvements, and offer a means for testing to validate this technology and determine when such improvements are ready for operational environments. To build devices which are more robust and capable of continued operation after billions of cycles requires that improved fabrication techniques be identified and perfected to allow for more sophisticated designs to be tested.

AFIT Designator

AFIT-ENG-DS-16-D-003

DTIC Accession Number

AD1032060

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