Date of Award
3-22-2012
Document Type
Thesis
Degree Name
Master of Science
Department
Department of Electrical and Computer Engineering
First Advisor
Ronald Coutu, PhD.
Abstract
Air Force Research Lab Air Vehicles directorate performs research on hypersonic vehicles. To verify materials or designs of hypersonic vehicles, they have a need to measure strain at temperatures exceeding 700°C. Strain sensors have the ability to measure strain. Strain is the deformation of materials due to internal stresses in a material. Internal stresses occur when a material is subjected to a force. Traditional strain sensors use Piezoresistive effects to measure strain, which is temperature dependent and making them unusable at high temperatures. This paper discusses a novel strain sensing device, sensing capacitance instead of piezoresistance. The strain sensor is modeled mathematically and simulated using Coventorware?. The results are presented here, along with recommendations for future work.
AFIT Designator
AFIT-GE-ENG-12-43
DTIC Accession Number
ADA558292
Recommended Citation
Weisenberger, Richard P., "Silicon Carbide Capacitive High Temperature MEMS Strain Transducer" (2012). Theses and Dissertations. 1165.
https://scholar.afit.edu/etd/1165