Document Type

Article

Publication Date

8-7-2023

Abstract

This paper concerns the development of a machine learning tool to detect anomalies in the molecular structure of Gallium Arsenide. We employ a combination of a CNN and a PCA reconstruction to create the model, using real images taken with an electron microscope in training and testing. The methodology developed allows for the creation of a defect detection model, without any labeled images of defects being required for training. The model performed well on all tests under the established assumptions, allowing for reliable anomaly detection. To the best of our knowledge, such methods are not currently available in the open literature; thus, this work fills a gap in current capabilities.

Comments

© 2023 by the authors. Licensee MDPI, Basel, Switzerland.

This article is licensed under a Creative Commons Attribution 4.0 International License (CC BY 4.0), which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

[*] Author notes: T. Roche and P. Cho were in AFIT graduate programs at the time of this effort.

DOI

10.3390/math11153428

Source Publication

Mathematics

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