Title
Method of making hinged self-referencing Fabry–Pérot cavity sensors [U.S. Patent US11287575B2]
Document Type
Patent
Publication Date
3-29-2022
Abstract
A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.
Source Publication
USPTO
Recommended Citation
Williams, Jeremiah C. and Chandrahalim, Hengky, "Method of making hinged self-referencing Fabry–Pérot cavity sensors [U.S. Patent US11287575B2]" (2022). Faculty Publications. 943.
https://scholar.afit.edu/facpub/943
Included in
Biomedical Engineering and Bioengineering Commons, Chemical Engineering Commons, Electrical and Computer Engineering Commons, Engineering Science and Materials Commons, Materials Science and Engineering Commons, Mechanical Engineering Commons, Nanoscience and Nanotechnology Commons, Physics Commons
Comments
U.S. Patent US11287575B2