Title

Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices

Document Type

Article

Publication Date

10-2012

Abstract

Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrothermal actuators have been dynamically tested to determine and compare the responses of devices from both processes. Furthermore, the integration of these devices into a safe and arming device were tested and investigated for each process. Initial results indicate that the SUMMiT devices provide the most optimum results based on consistency of operation and reliability.

Comments

Published by Springer as a work of the U.S. Federal government. Its text is subject to foreign copyright protection.
© Society for Experimental Mechanics (outside the USA) 2012

The "Link to Full Text" on this page loads the PDF of the work, furnished through the Springer Nature online portal.

DOI

10.1007/s11340-011-9579-8

Source Publication

Experimental Mechanics

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