Advanced Integration of 3D Optomechanical Sensor Microsystems with Optical Fibers

Authors

Hengky Chandrahalim, Air Force Institute of TechnologyFollow
Jeremiah C. Williams, Air Force Institute of Technology

Document Type

Conference Proceeding

Publication Date

10-20-2024

Abstract

The ever-increasing demand for affordable, compact, and integrated sensors necessitates innovations that outperform traditional, bulkier counterparts. This paper introduces an advanced integration of 3D optomechanical sensor microsystems with optical fibers, using a two-photon nanomachining process. This technique enables the fabrication of complex 3D structures, including dynamic and movable features, unattainable through conventional photolithography. We present sensor microsystems incorporating resonant and non-resonant cavities, demonstrating exceptional sensitivity and operational range. The resonant microsensors offer heightened sensitivity to environmental conditions, while the non-resonant counterparts use rotating reflective microblades for precise flow sensing. Utilizing optical fiber as the substrate, these sensors transmit detected information in real-time to remote locations with minimal loss, eliminating the need for additional packaging, amplifiers, signal processing, and data transmission components. This innovative integration promises a new generation of highly sensitive, compact, and versatile sensor systems, ideal for contemporary engineering applications. Abstract © IEEE.

Comments

This conference paper is available to IEEE subscribers through the DOI link below.

DOI

10.1109/SENSORS60989.2024.10784872

Source Publication

IEEE Sensors 2024

Recommended Citation

H. Chandrahalim and J. C. Williams, "Advanced Integration of 3D Optomechanical Sensor Microsystems with Optical Fibers," 2024 IEEE SENSORS, Kobe, Japan, 2024, pp. 1-4, doi: 10.1109/SENSORS60989.2024.10784872.