Date of Award


Document Type


Degree Name

Doctor of Philosophy (PhD)


Department of Electrical and Computer Engineering

First Advisor

Edward S. Kolesar, PhD


This investigation designed and developed a miniature gas chromatograph (GC) using silicon micromachining techniques. The GC is composed of a miniature sample injector (10 µl sample loop); a 0.9 m long, rectangular-shaped (300 µm width and 10 micrometers height) capillary column coated with a 0.2 µm thick copper phthalocyanine (CuPc) stationary phase; and a dual-detector scheme incorporating a CuPc-coated chemiresistor and a 125 µm diameter thermal conductivity detector bead. Micromachining was employed to fabricate the sample injector interface, the GC column, and the dual-detector cavity. A novel processing technique was developed to sublime the CuPc stationary phase coating on the GC column walls. The miniature GC system has been used to separate parts-per-million ammonia and nitrogen dioxide concentrations in less than 30 minutes (10 µl sample injected at 40 psi). A secondary discovery was the heat of adsorption of nitrogen dioxide (0.38 eV) on a polycrystalline CuPc film (0.2 µm thick) . This research demonstrated the utilization of a miniature GC to investigate the adsorptive properties of thin films. Also, the time-domain performance model of the miniature GC developed in this investigation will facilitate the optimization of future miniature GC designs.

AFIT Designator


DTIC Accession Number



The author's Vita page is omitted.